HOME > 論文 > 書誌詳細Effects of residual hydrogen in sputtering atmosphere on structures and properties of amorphous In-Ga-Zn-O thin filmsHaochun Tang, Kyohei Ishikawa, Keisuke Ide, Hidenori Hiramatsu, Shigenori Ueda, Naoki Ohashi, Hideya Kumomi, Hideo Hosono, Toshio Kamiya. Journal of Applied Physics 118 [20] 205703. 2015.https://doi.org/10.1063/1.4936552 NIMS著者上田 茂典大橋 直樹Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 17:59:51 +0900更新時刻: 2024-04-01 20:03:28 +0900
