HOME > Article > DetailA probe-positioning method with two dimensional calibration pattern for micro-multi-point probesWataru Yashiro, Ichiro Shiraki, Kazushi Miki. Review of Scientific Instruments 74 [5] 2722-2725. 2003.https://doi.org/10.1063/1.1569390 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 11:55:39 +0900 Updated at: 2026-10-29 04:30:55 +0900
