HOME > 論文 > 書誌詳細Modeling of transient nonequilibrium phenomena in an inductively coupled plasma under pulsed power conditionsR. Ye, T. Ishigaki. Journal of Applied Physics 97 [12] 123306. 2005.https://doi.org/10.1063/1.1931036 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 14:46:50 +0900 更新時刻: 2026-11-01 05:09:50 +0900
