Initial Plasma Oxidation Kinetics of Silicon :Dc Bias Effects
(シリコンの初期プラズマ酸化の速度論：DC バイアス効果)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:39:06 +0900 Updated at: 2022-11-15 00:39:06 +0900