HOME > Article > DetailMechanochemical Polishing of Silicon Carbide Single Crystal with Chromium(III) Oxide abrasiveBANDO, Yoshio, 菊地正夫, 高橋裕, 須賀唯知, 鈴木茂信. Jr. American Ceramics Society 189-194. 1992.NIMS author(s)BANDO, YoshioFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 10:34:36 +0900 Updated at: 2022-09-05 10:34:36 +0900