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Mechanochemical Polishing of Silicon Carbide Single Crystal with Chromium(III) Oxide abrasive

BANDO, Yoshio, 菊地正夫, 高橋裕, 須賀唯知, 鈴木茂信.

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    Created at: 2022-09-05 10:34:36 +0900 Updated at: 2022-09-05 10:34:36 +0900

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