金属薄膜TiNi/ガラス界面のArイオンミクシングとシリサイド形成.
(Ar Ion Mixing of Metallic Film TiNi/Glass Interface and Silicide Formation.)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:30:19 +0900 Updated at: 2018-12-14 23:27:52 +0900