HOME > Article > DetailAchieving non-degenerate Zn3N2 thin films by near room temperature sputtering depositionYong Wang, Takeo Ohsawa, Yu Kumagai, Kou Harada, Fumiyasu Oba, Naoki Ohashi. Applied Physics Letters 115 [9] 092104. 2019.https://doi.org/10.1063/1.5101037 NIMS author(s)OHSAWA, TakeoOHASHI, NaokiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2019-09-14 03:00:17 +0900Updated at: 2024-03-31 02:08:38 +0900