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First-principles study of chlorine atom diffusion on Si(111)–5×5 reconstructed surfaces
(First-principles study of chlorine atom diffusion on Si(1 1 1)–5 ×5 reconstructed surfaces)

Yusuke Asari, Jun Nara, Takahisa Ohno.
Applied Surface Science 267 70-73. 2013.
https://doi.org/10.1016/j.apsusc.2012.07.015

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      作成時刻: 2016-05-24 17:05:10 +0900更新時刻: 2024-04-02 04:22:55 +0900

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