HOME > Article > DetailCharacteristics of a Silicon Pressure Sensor in Superfluid Helium Pressurized up to 1.5 MPa(1.5MPaまで加圧された超流動ヘリウム中のシリコン圧力センサーの特性)M. Maeda, A. Sato, M. Yuyama, M. Kosuge, F. Matsumoto, H. Nagai. Cryogenics 44 [4] 217-222. 2004.https://doi.org/10.1016/j.cryogenics.2003.12.003 NIMS author(s)YUYAMA, MichinariFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 11:56:42 +0900Updated at: 2024-05-02 04:43:14 +0900