Effects of N2/Ar gas ratio on phase formation and tribology of Ti-Si-N composite coatings prepared by hybrid PVD

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Effects of N₂/Ar gas ratio on phase formation and tribology of Ti–Si–N composite coatings prepared by hybrid PVD
(Effects of N2/Ar gas ratio on phase formation and tribology of Ti-Si-N composite coatings prepared by hybrid PVD)

Chan-Young PARK, Sung-Min LEE, Seong-Won KIM, Hyung-Tae KIM, Byung Koog JANG, Yoon-Suk OH.

Open Access Ceramic Society of Japan (Publisher)

作成時刻: 2016-05-24 17:24:35 +0900更新時刻: 2024-09-12 05:50:23 +0900