Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography
(多光束レーザー干渉法によるTiO2ピラー周期構造体の作製)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 15:52:40 +0900 Updated at: 2026-10-30 08:52:34 +0900