HOME > 論文 > 書誌詳細Effects of Plasma and/or 193nm Excimer-Laser Irradiation in Chemical-Vapor Deposition of Boron Films From B2H6+He小松正二郎, 守吉佑介, 笠松充男, 山田家和勝. Journal of Applied Physics 5654-5664. 1992.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:34:45 +0900 更新時刻: 2022-09-05 10:34:45 +0900
