SAMURAI - NIMS Researchers Database

HOME > Article > Detail

A versatile patterning process based on easily soluble sacrificial bilayers

Takayuki Harada, Atsushi Tsukazaki.
AIP Advances 7 [8] 085011. 2017.
https://doi.org/10.1063/1.4993660
Open Access AIP Publishing (Publisher)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2021-03-04 12:46:42 +0900Updated at: 2024-05-01 05:57:48 +0900

    ▲ Go to the top of this page