In situ transmission electron microscopy observation of thin solid aluminum film thermal flow into submicron-sized periodic grooves fabricated on a silicon oxide substrate
(シリコン酸化基板上に作製されたサブミクロン周期溝中への固体Al薄膜の流入現象のその場電子顕微鏡観察)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:41:41 +0900 Updated at: 2026-09-29 08:41:03 +0900
