HOME > Article > DetailDevelopment of a new laser heating system for thin film growth by chemical vapor depositionEiji Fujimoto, Masatomo Sumiya, Tsuyoshi Ohnishi, Mikk Lippmaa, Masaki Takeguchi, Hideomi Koinuma, Yuji Matsumoto. Review of Scientific Instruments 83 [9] 094701. 2012.https://doi.org/10.1063/1.4748126 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:56:15 +0900Updated at: 2025-01-09 06:47:18 +0900