Development of a new laser heating system for thin film growth by chemical vapor deposition

著者	Eiji Fujimoto, Masatomo Sumiya, Tsuyoshi Ohnishi, Mikk Lippmaa, Masaki Takeguchi, Hideomi Koinuma, Yuji Matsumoto.
掲載誌名	Review of Scientific Instruments 83 [9] 094701 ISSN: 00346748, 10897623 ESIでのカテゴリ: CHEMISTRY
出版社	AIP Publishing
発表年	2012
言語	English
DOI	https://doi.org/10.1063/1.4748126
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