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Development of a new laser heating system for thin film growth by chemical vapor deposition

著者Eiji Fujimoto, Masatomo Sumiya, Tsuyoshi Ohnishi, Mikk Lippmaa, Masaki Takeguchi, Hideomi Koinuma, Yuji Matsumoto.
掲載誌名Review of Scientific Instruments 83 [9] 094701
ISSN: 10897623, 00346748
ESIでのカテゴリ: CHEMISTRY
出版社AIP Publishing
発表年2012
言語English
DOIhttps://doi.org/10.1063/1.4748126
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