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AuthorS Kuwano, Q.-Z Xue, Y Asano, Y Fujikawa, Q.-K Xue, Koji S Nakayama, T Nagao, T Sakurai.
TitleBilayer-by-bilayer etching of 6H-GaN(0001) with Cl
Journal titleSurface Science 561 [2-3] L213-L217
ISSN: 00396028
Year of publication2004
LanguageEnglish
ESI categoryPHYSICS
DOIhttps://doi.org/10.1016/j.susc.2004.05.098
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