HOME > Article > DetailBilayer-by-bilayer etching of 6H-GaN(0001) with ClS Kuwano, Q.-Z Xue, Y Asano, Y Fujikawa, Q.-K Xue, Koji S Nakayama, T Nagao, T Sakurai. Surface Science 561 [2-3] L213-L217. 2004.https://doi.org/10.1016/j.susc.2004.05.098 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 14:40:39 +0900Updated at: 2024-03-31 18:34:45 +0900