HOME > Article > DetailReduction and removing of Al oxide film deposited on Cu substrate by electron beam(Cu基板上に蒸着したAl2O3膜の電子線による還元)A.Rar, YOSHITAKE, Michiko. Jpn.J.Appl.Phys. 4464-4468. 2000.NIMS author(s)YOSHITAKE, MichikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-11-15 00:39:27 +0900 Updated at: 2022-11-15 00:39:27 +0900