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Reduction and removing of Al oxide film deposited on Cu substrate by electron beam
(Cu基板上に蒸着したAl2O3膜の電子線による還元)

Jpn.J.Appl.Phys. 4464-4468. 2000.

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    Created at: 2022-11-15 00:39:27 +0900 Updated at: 2022-11-15 00:39:27 +0900

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