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マグネトロスパッタによるMoのTixC1-x被膜の特性
(Properities of TixC1-x Films Coate on Molybdenum by Magnetron Sputtering)

四竃樹男, 新野仁, 福富勝夫, 藤塚正和, 北島 正弘, 岡田雅年, T. Shikama, H. Shinno, M. Fukutomi, M. Fujitsuka, M. Okada.
Thin Solid Films 101 [3] 233-242. 1983.
https://doi.org/10.1016/0040-6090(83)90250-x

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