HOME > Article > DetailFabrication of self-masked InP nanopillars by electron cyclotron resonance ion etchingPARAMANIK Dipak. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES 44 [7–8] 1644-1648. 2012.https://doi.org/10.1016/j.physe2012.04.012 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:47:37 +0900 Updated at: 2026-11-09 08:33:53 +0900
