SAMURAI - NIMS Researchers Database

HOME > 論文 > 書誌詳細

Resistivity Reduction in Very Narrow Cu Wiring
(Resistivity Reduction in Very Narrow CuWiring)

Jin Onuki, Yasushi Sasajima, Kunihiro Tamahashi, YiQing Ke, Shohei Terada, Kishio Hidaka, Shinji Itoh.
Journal of The Electrochemical Society 160 [12] D3266-D3270. 2013.
https://doi.org/10.1149/2.045312jes

NIMS著者

    Materials Data Repository (MDR)上の本文・データセット

      作成時刻: 2016-05-24 17:29:50 +0900 更新時刻: 2025-06-22 04:41:11 +0900

      ▲ページトップへ移動