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FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application
(NA)

著者B. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto, ZHENG, Bangke, IKEDA, Naoki, TAKEDA, Yoshihiko, SATO, Keisuke, SATO, Rodrigo, AMEKURA, Hiroshi, OYOSHI, Keiji, KONO, Kenichiro, M.E. Edwards, HASEGAWA, Akira, D. Ila, KISHIMOTO, Naoki.
掲載誌名NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 272 183-187
ISSN: 0168583X
ESIでのカテゴリ: PHYSICS
出版社
発表年2012
言語English

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