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FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application
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B. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 272 183-187. 2012.
https://doi.org/10.1016/j.nimb.2011.01.061

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