HOME > 論文 > 書誌詳細FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application(NA)B. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 272 183-187. 2012.https://doi.org/10.1016/j.nimb.2011.01.061 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 16:22:03 +0900更新時刻: 2024-04-02 04:10:40 +0900
