HOME > Article > DetailHighly conductive epitaxial ZnO layers deposited by atomic layer depositionZs. Baji, Z. Lábadi, Gy. Molnár, B. Pécz, K. Vad, Z.E. Horváth, P.J. Szabó, T. Nagata, J. Volk. Thin Solid Films 562 485-489. 2014.https://doi.org/10.1016/j.tsf.2014.04.047 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 17:40:42 +0900 Updated at: 2026-10-30 07:13:25 +0900
