HOME > Article > DetailMEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond filmsAnirudha V. Sumant, Orlando Auciello, Meiyong Liao, Oliver A. Williams. MRS Bulletin 39 [6] 511-516. 2014.https://doi.org/10.1557/mrs.2014.98 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 17:30:51 +0900 Updated at: 2026-09-29 06:47:31 +0900
