HOME > 論文 > 書誌詳細Transition of the apparent activation energy for the growth of boron films as a function of substrate temperature in plasma-enha小松正二郎, 守吉佑介. Journal of Physics D: Appl. Phys. 23(1990) 1244-1251. 1990.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:32:00 +0900 更新時刻: 2022-09-05 10:32:00 +0900
