HOME > 論文 > 書誌詳細Numerical Modeling of an Ar–H2 Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium ConditionsRubin Ye, Anthony B. Murphy, Takamasa Ishigaki. Plasma Chemistry and Plasma Processing 27 [2] 189-204. 2007.https://doi.org/10.1007/s11090-007-9055-5 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 15:12:03 +0900 更新時刻: 2026-11-02 04:25:03 +0900
