HOME > Article > DetailNovel Stacked Nanodisk with Quantum Effect Fabricated by Defect-free Chlorine Neutral Beam EtchingChi-Hsien Huang, Makoto Igarashi, kensuke Nishioka, TAKEGUCHI, Masaki, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Seiji Samukawa. APPLIED PHYSICS EXPRESS 1 [ 8] 084002-1-084002-3. 2008.NIMS author(s)TAKEGUCHI, MasakiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 15:34:14 +0900 Updated at: 2018-12-15 01:35:06 +0900
