HOME > 論文 > 書誌詳細Silicon Nitride Coatings on Molybdenum by RF-Reactive Ion PlantingM.Fukutomi, M.Okada, R.Watanabe, Masao Fukutomi, M.Fukutomi, M.Okada, R.Watanabe. Journal of The Electrochemical Society 124 [9] 1420. 1977.https://doi.org/10.1149/1.2133666 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 11:21:39 +0900更新時刻: 2025-03-12 04:22:55 +0900