Ultrahigh vacuum and low-temperature cleaning of oxide surfaces using a low-concentration ozone beam
| Author(s) | A. Pratt, P. Graziosi, I. Bergenti, M. Prezioso, A. Dediu, Y. Yamauchi. |
|---|---|
| Journal title | Review of Scientific Instruments 85 [7] 075116 ISSN: 00346748, 10897623 ESI category: CHEMISTRY |
| Publisher | AIP Publishing |
| Year of publication | 2014 |
| Language | English |
| DOI | https://doi.org/10.1063/1.4890208 |
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