HOME > Article > DetailUltrahigh vacuum and low-temperature cleaning of oxide surfaces using a low-concentration ozone beamA. Pratt, P. Graziosi, I. Bergenti, M. Prezioso, A. Dediu, Y. Yamauchi. Review of Scientific Instruments 85 [7] 075116. 2014.https://doi.org/10.1063/1.4890208 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 17:32:43 +0900Updated at: 2025-01-09 07:22:17 +0900