HOME > 論文 > 書誌詳細Characterizing macroscopic lateral distortion in nanoimprint lithography using moiré interferometryX. Dai, H. Xie, F. Dai, S. Kishimoto. Applied Physics Letters 108 [5] 053109. 2016.https://doi.org/10.1063/1.4941404 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-12-08 20:51:18 +0900更新時刻: 2024-03-30 00:17:43 +0900
