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Improvement of Depth Resolution of ADF-SCEM by Deconvolution: Effects of Electron Energy Loss and Chromatic Aberration on Depth Resolution

Xiaobin Zhang, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Meguru Tezuka, Masayuki Shimojo.
Microscopy and Microanalysis 18 [3] 603-611. 2012.
https://doi.org/10.1017/s1431927612000062

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