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Amorphous Si waveguides with high-quality stacked gratings for multi-layer Si optical circuits
(多層シリコン光回路のための高品質積層グレーティングを有するアモルファス・シリコン導波路)

H. Tokushige, T. Endo, K. Saiki, K. Hiidome, S. Kitamura, T. Katsuyama, M. Tokuda, H. Takagi, M. Morita, Y. Ito, K. Tsutsui, Y. Wada, N. Ikeda, Y. Sugimoto.

NIMS author(s)


    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at: 2016-05-24 17:34:05 +0900 Updated at: 2026-11-09 05:19:17 +0900

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