HOME > 論文 > 書誌詳細Transition from Thermal to Election impact decomposition of diborane in Plasma Enbanced chemical Vapor Deposition of Boron films守吉佑介, 小松正二郎. Journal of Appled Physics 1180. 1989.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:30:41 +0900 更新時刻: 2022-09-05 10:30:41 +0900
