HOME > 論文 > 書誌詳細The roles of hydrogen and fluorine in the deposition of cubic boron nitride films in the Ar-N2-BF3-H2 systemZHANG Wenjun (張文軍), 松本精一郎. CHEMICAL PHYSICS LETTERS 243-248. 2000.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 11:01:12 +0900 更新時刻: 2022-09-05 11:01:12 +0900
