Deposition of in-plane Texfured Film by Sputtering and Its Application to SuperConducting Thin Film
(スパッタ法による面内配向制御と超伝導膜への応用)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:35:04 +0900 Updated at: 2018-12-15 00:03:19 +0900