プラズマジェットCVDによるc-BN膜の合成
(Synthesis of c-BN films by plasma jet CVD)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:06:40 +0900 Updated at: 2022-09-05 11:06:40 +0900