Si Submonolayer and Monolayer Digital Growth Operation Techniques Using Si2H6 as Atomically Controlled Growth Nanotechnology | SAMURAI, NIMS Researchers Directory Service

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Si Submonolayer and Monolayer Digital Growth Operation Techniques Using Si2H6 as Atomically Controlled Growth Nanotechnology

Yoshiyuki Suda, Naoyuki Hosoya, Kazushi Miki.

Applied Surface Science 216 [1-4] 424-430. 2003.

https://doi.org/10.1016/s0169-4332(03)00387-8

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 11:55:35 +0900 Updated at: 2026-10-03 06:14:44 +0900

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