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Crystalinity and thickness control of epitaxial ultra-thin Al2O3 film
(極薄エピタキシャルアルミナ膜の結晶性と膜厚の制御)

M Yoshitake, B Mebarki, T.T Lay.
Surface Science 511 [1-3] L313-L318. 2002.
https://doi.org/10.1016/s0039-6028(02)01567-4

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    Created at: 2016-05-24 11:46:49 +0900 Updated at: 2026-08-01 05:48:44 +0900

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