Precise Damage Observation in Ion-Beam Etched MTJ

Yuichi Ohsawa; Naoharu Shimomura; Tadaomi Daibou; Yuzo Kamiguchi; Satoshi Shirotori; Tomoaki Inokuchi; Daisuke Saida; Buyandalai Altansargai; Yushi Kato; Hiroaki Yoda; Tadakatsu Ohkubo; Kazuhiro Hono

doi:10.1109/tmag.2015.2512588

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Precise Damage Observation in Ion-Beam Etched MTJ

Yuichi Ohsawa, Naoharu Shimomura, Tadaomi Daibou, Yuzo Kamiguchi, Satoshi Shirotori, Tomoaki Inokuchi, Daisuke Saida, Buyandalai Altansargai, Yushi Kato, Hiroaki Yoda, Tadakatsu Ohkubo, Kazuhiro Hono.

IEEE Transactions on Magnetics 52 [7] 1-3. 2016.

https://doi.org/10.1109/tmag.2015.2512588

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作成時刻: 2017-02-19 23:35:36 +0900更新時刻: 2024-04-01 23:31:07 +0900