Integration of high-dielectric constant Ta<sub>2</sub>O<sub>5</sub> oxides on diamond for power devices | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Integration of high-dielectric constant Ta₂O₅ oxides on diamond for power devices
(Integration of high-dielectric constant Ta2O5 oxides on diamond for power devices)

Shaoheng Cheng, Liwen Sang, Meiyong Liao, Jiangwei Liu, Masataka Imura, Hongdong Li, Yasuo Koide.

Applied Physics Letters 101 [23] 232907. 2012.

https://doi.org/10.1063/1.4770059

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作成時刻: 2016-05-24 16:53:18 +0900更新時刻: 2024-10-06 07:53:21 +0900

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