Sputtering Yield of Ti1-xBx Films by 2KeV Deuterium Bumhardment
(2KeVの重水素照射によるTi1―xBx皮膜のスパッタ率)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:29:39 +0900 Updated at: 2026-10-01 05:29:43 +0900
