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Controllable film densification and interface flatness for high-performance amorphous indium oxide based thin film transistors

Wei Ou-Yang, Nobuhiko Mitoma, Takio Kizu, Xu Gao, Meng-Fang Lin, Toshihide Nabatame, Kazuhito Tsukagoshi.
Applied Physics Letters 105 [16] 163503. 2014.
https://doi.org/10.1063/1.4898815

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