Suppression of conductivity deterioration of copper thin films by coating
with atomic-layer materials
(Suppression of conductivity deterioration of copper thin films by coating with atomic-layer materials)
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-10-11 20:55:45 +0900 更新時刻: 2026-10-30 04:27:53 +0900