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Micro/submicro grating fabrication on metals for deformation measurement based on ultraviolet nanoimprint lithography

Qinghua Wang, Satoshi Kishimoto, Yoshihisa Tanaka, Yutaka Kagawa.
Optics and Lasers in Engineering 51 [7] 944-948. 2013.

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      作成時刻: 2016-05-24 16:48:39 +0900更新時刻: 2024-06-04 09:20:56 +0900

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