Micro/submicro grating fabrication on metals for deformation measurement based on ultraviolet nanoimprint lithography

著者	Qinghua Wang, Satoshi Kishimoto, Yoshihisa Tanaka, Yutaka Kagawa.
掲載誌名	Optics and Lasers in Engineering 51 [7] 944-948 ISSN: 01438166 ESIでのカテゴリ: ENGINEERING
出版社	Elsevier BV
発表年	2013
言語	English
DOI	https://doi.org/10.1016/j.optlaseng.2013.02.021
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