HOME > 論文 > 書誌詳細Micro/submicro grating fabrication on metals for deformation measurement based on ultraviolet nanoimprint lithographyQinghua Wang, Satoshi Kishimoto, Yoshihisa Tanaka, Yutaka Kagawa. Optics and Lasers in Engineering 51 [7] 944-948. 2013.https://doi.org/10.1016/j.optlaseng.2013.02.021 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 16:48:39 +0900 更新時刻: 2026-10-08 06:36:44 +0900
