SAMURAI - NIMS Researchers Database

NIMS open house 2024

HOME > Article > Detail

Hydrogen effect on near-atmospheric nitrogen plasma assisted chemical vapor deposition of GaN film growth

T. Nagata, M. Haemori, Y. Sakuma, T. Chikyow, J. Anzai, T. Uehara.
Journal of Applied Physics 105 [6] 066106. 2009.

NIMS author(s)


    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at: 2016-05-24 15:45:49 +0900Updated at: 2024-05-01 08:54:25 +0900

      ▲ Go to the top of this page