Hydrogen effect on near-atmospheric nitrogen plasma assisted chemical vapor deposition of GaN film growth | SAMURAI, NIMS Researchers Directory Service

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Hydrogen effect on near-atmospheric nitrogen plasma assisted chemical vapor deposition of GaN film growth

T. Nagata, M. Haemori, Y. Sakuma, T. Chikyow, J. Anzai, T. Uehara.

Journal of Applied Physics 105 [6] 066106. 2009.

https://doi.org/10.1063/1.3086715

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Created at: 2016-05-24 15:45:49 +0900 Updated at: 2026-10-30 08:47:47 +0900

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