HOME > 論文 > 書誌詳細Hydrogen effect on near-atmospheric nitrogen plasma assisted chemical vapor deposition of GaN film growthT. Nagata, M. Haemori, Y. Sakuma, T. Chikyow, J. Anzai, T. Uehara. Journal of Applied Physics 105 [6] 066106. 2009.https://doi.org/10.1063/1.3086715 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 15:45:49 +0900更新時刻: 2024-03-31 17:38:56 +0900
