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Capability of focused Ar ion beam sputtering for combinatorial synthesis of metal films
(Capability of focused Ar ion beam sputtering method for combinatorial synthesis of metal films)

T. Nagata, M. Haemori, T. Chikyow.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 27 [3] 492-495. 2009.
https://doi.org/10.1116/1.3097847

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