HOME > Article > DetailExperimentally diagnosed transient behavior of pulse modulated inductively coupled thermal plasma作田忠裕, K.C.Paul, 香月真, 石垣隆正. Journal of Applied Physics 1372-1377. 1999.NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 10:55:58 +0900 Updated at: 2022-09-05 10:55:58 +0900