HOME > 論文 > 書誌詳細Nonequilibrium condition in a pulse-modulated Ar-H2 inductively coupled thermal plasmas for hydrogen dopingRubin, YE, ISHIGAKI, Takamasa. THIN SOLID FILMS 4407-4414. 2008.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-10-21 22:23:54 +0900 更新時刻: 2022-10-21 22:23:54 +0900
