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Control of structure, size and density of Ge dot on Si(100) through multistep procedure
(多段階法によるGeドットの構造・サイズ・密度の制御)

WAKAYAMA, Yutaka, G.Gerth, P.Werner, U.Goesele, L.V.Sokolov.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2022-09-05 11:06:32 +0900 Updated at: 2022-09-05 11:06:32 +0900

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